http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-108085657-B
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-505 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-505 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-26 |
| filingDate | 2017-12-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2020-03-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2020-03-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-108085657-B |
| titleOfInvention | Method for preparing nitrogen-doped diamond-like carbon film based on helicon wave plasma technology |
| abstract | The invention relates to a method for preparing a nitrogen-doped diamond-like carbon film based on a helicon wave plasma technology, which comprises the following steps: (1) cleaning the Si substrate, and fixing the cleaned Si substrate on a substrate table in a deposition chamber; (2) introducing high-purity Ar gas into the discharge chamber from the left end of the discharge chamber to realize spiral wave plasma discharge and form Ar plasma; (3) introducing high-purity CH into the deposition chamber 4 Gas and high purity N 2 Gas, Ar plasma will highly pure CH 4 Gas and high purity N 2 Gas ionization, forming a nitrogen-doped diamond-like carbon film on the Si substrate; (4) and turning off the radio frequency power supply and all gas sources. The nitrogen-doped diamond-like carbon film has high deposition speed; the deposited film nitrogen-doped diamond-like carbon film has flat, uniform and compact surface and good deposition quality; the nitrogen-doped diamond-like carbon film has high purity, the internal stress of the film is reduced, the adhesive force between the film and a substrate is improved, and the strength of the film is improved; the equipment is simple, and the industrial production is easy to realize. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2022119735-A1 |
| priorityDate | 2017-12-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 25.