http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-3900956-B2
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02E50-30 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-505 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-46 |
| filingDate | 2002-02-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2007-04-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2007-04-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-3900956-B2 |
| titleOfInvention | Plasma processing method and apparatus |
| priorityDate | 2002-02-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 35.