| abstract |
In a member having a hydrogen-containing, amorphous carbon coating having a relatively smooth surface, similarly amorphous, fine carbon particles are dispersed in the hydrogen-containing, amorphous carbon coating to have improved cracking resistance while keeping smoothness on the surface and hardness in the entire coating. Specifically, fine particles discharged from a carbon cathode of an arc evaporation source by arc discharge are introduced into the coating, so that similarly amorphous, fine carbon particles are dispersed in the hydrogen-containing, amorphous carbon coating. |