http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2003341673-A
Outgoing Links
Predicate | Object |
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assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_3415cdea463c93f5a5cde1d1b07e826b |
classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-045 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B65D23-02 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B65D23-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B65D1-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-27 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-505 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-04 |
filingDate | 2002-05-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2201284ff6df5be75a7bc15eab0d67c9 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cecfce2d579ca170af3af928cf0835a1 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4028ffd7647166265d433f0110445c19 |
publicationDate | 2003-12-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | JP-2003341673-A |
titleOfInvention | DLC film coated plastic container manufacturing equipment |
abstract | (57) Abstract: The present invention is to stably ignite plasma and sustain discharge by arranging a mouth-side electrode facing a container-side electrode outside the container, and at the same time, to reduce dust in the mouth-side electrode. The purpose is to prevent adhesion. The present invention relates to an insulator forming a part of a decompression chamber, comprising a container-side electrode forming a part of a decompression chamber for accommodating a plastic container and an opening-side electrode disposed above an opening of the plastic container. The raw material gas supply means for supplying the raw material gas for coating the inner wall surface of the plastic container with the DLC film while being turned into plasma while supplying the raw material gas supplied to the decompression chamber to the inside of the plastic container from the insulating material A source gas introduction pipe is provided in the decompression chamber, exhaust means for exhausting gas in the decompression chamber from above the opening of the plastic container is provided, and high-frequency supply means for supplying high frequency to the container-side electrode is connected. . |
isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8808797-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8186301-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010539333-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2018095940-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-5260050-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2021008669-A |
priorityDate | 2002-05-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 36.