http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008153148-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_73ebc284a55d5daf0e209d6186c9e65c |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-505 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-24 |
| filingDate | 2006-12-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9c00cd88647b9066a1a48b60da652e68 |
| publicationDate | 2008-07-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2008153148-A |
| titleOfInvention | Plasma processing equipment |
| abstract | A plasma processing apparatus having a simple structure capable of efficiently processing a surface to be processed of a workpiece in a short time. A plasma processing apparatus includes a pair of flat plate-like first electrodes arranged to face each other substantially in parallel via a gap, a workpiece setting unit for setting a workpiece, and a workpiece setting. A power supply including a second electrode 3 disposed opposite to the lower end of the first electrode 2 via the unit 100, and a power supply 72 for applying a voltage between the first electrode 2 and the second electrode 3. A circuit 7 and gas supply means 8 for supplying a processing gas for generating plasma to the gap 40 are provided, and the processing gas is supplied to the gap 40 while the first electrode 2 and the second electrode 3 are interposed. By applying a voltage, the processing gas is activated to generate plasma, and the plasma is ejected from the plasma ejection portion 5 formed at the lower end of the gap 40 to treat the surface 101 to be processed of the workpiece 10. It is configured. [Selection] Figure 1 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2011528165-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2016072258-A |
| priorityDate | 2006-12-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 18.