| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_ae7b57cb427de2c773818e7bd86e92be |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3244 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-505
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-31
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-46
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-455 |
| filingDate |
2015-05-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4dfe70a3c8ad10894390e2b0f47364d6
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3351314d555dcbafd7c3c76da23892b8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_293f217827e030008184e3d2434b9d64
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_66211bbb5f12bd8e98fee62a26cc1dca
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d0f69146b9c41839247ab7bf1912fa53 |
| publicationDate |
2015-12-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2015225856-A |
| titleOfInvention |
Gas distribution apparatus and substrate processing apparatus having the same |
| abstract |
A gas distribution apparatus capable of improving process uniformity on a substrate by using double plasma and a substrate processing apparatus including the gas distribution apparatus are provided. A first region (500) and a second region (600) partitioned in a vertical direction are provided inside, and the first region (500) receives a gas supply from the outside through a first process gas supply pipe (310). Gas distribution apparatus 400 that injects after being excited after being excited to a plasma state and injecting gas from the second process gas supply unit that is excited and supplied from the outside to the plasma state in second region 600, and this A substrate processing apparatus comprising: [Selection] Figure 1 |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2019503077-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7133240-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11661656-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2021520642-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2022010557-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2021116474-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101744379-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2017169556-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2020195980-A1 |
| priorityDate |
2014-05-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |