| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1af8df51ce24ca931ae718fb747f6aa0 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-407
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02F1-13439
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L31-1884
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-505 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-50
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C03C17-245
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L31-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02F1-1343
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-40
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-505
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L31-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-285
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-28 |
| filingDate |
1986-04-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e78d5ff5780fb4e75e3a299e2e166c77
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_daef71aa57fe55ade680be3741d672a0 |
| publicationDate |
1987-11-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-S62260064-A |
| titleOfInvention |
Formation of thin tin oxide film |
| abstract |
PURPOSE:To obtain a thin SnO2 film of high quality at <=200 deg.C temp. of a substrate by converting a gaseous mixture of starting material with a reducing gas into plasma, reducing the starting material and oxidizing the resulting product with an oxidizing gas. CONSTITUTION:SnCl4 as starting material is mixed with gaseous H2 having reducing action. This gaseous mixture is converted into plasma with an exciting source under reduced pressure and the starting material is reduced. The resulting product is oxidized by reaction with gaseous O2 having oxidizing action to form a thin SnO2 film on a substrate. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6889410-B2 |
| priorityDate |
1986-04-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |