http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-114892143-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c1a2a3aea0ca9b824c17551d36c2308a |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02E30-30 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-0245 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-325 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-505 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-045 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-32 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-505 |
| filingDate | 2022-05-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_81272e7cd096d513d8a37846c1ee27f2 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e0097898312eaac5fe9db6e508dfbb08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_51ca79e65fe930779c2ae3a437fc098f http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8dccf1e0b27f9fba62484c53616d037e |
| publicationDate | 2022-08-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-114892143-A |
| titleOfInvention | Method and device for depositing nano-SiC coating on inner wall of slender stainless steel tube |
| abstract | A method for depositing a nano-SiC coating on the inner wall of a slender stainless steel tube belongs to the technical field of coating preparation. The method is as follows: based on a helical wave plasma source, the slender stainless steel tube is ion bombarded by introducing Ar into the vacuum chamber, and the surface impurities are washed away, and then the mixed gas of Ar and Si(CH 3 ) 4 is filled into the vacuum chamber , the mixed gas is excited and ionized under the action of the helical wave source, and a high-density plasma column with a plasma density greater than 10 19 m 3 is generated in the stainless steel tube, and then a pulse negative bias is applied to the workpiece to deposit nano-SiC on its inner surface. film. The invention is simple to operate, convenient, easy to realize, and easy to industrialize production, and can be prepared without the need of heating or on the premise that the stainless steel slender tube substrate is not deformed during the treatment process. A method of abraded SiC coating that increases the service life of stainless steel slender tubes operating in harsh environments. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-115821200-A |
| priorityDate | 2022-05-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419556224 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID2244 |
Total number of triples: 24.