| abstract |
An object of the present invention is to provide a processing method and a processing apparatus for forming a high-performance article which is not large-scale, has low apparatus cost, hardly causes dust adhesion and contamination, has high productivity, and is excellent in quality. An object of the present invention is to provide an optical element having excellent functionality, low production cost and excellent quality. A plasma discharge process is performed in a discharge space between an electrode of a plasma discharge device and a movable gantry that can be moved with a substrate mounted thereon, and then the movable gantry is moved to the next plasma discharge device to perform an atmospheric pressure plasma discharge process. The problem can be solved by an atmospheric pressure plasma discharge treatment method using an apparatus. [Selection diagram] Fig. 1 |