Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d80f1040809503e54509c871ba828f75 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-321 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05H1-24 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-205 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-505 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-46 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-505 |
filingDate |
2009-12-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9574299c397df9fbc67b594739c8b542 |
publicationDate |
2011-06-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
TW-201119519-A |
titleOfInvention |
Inductively coupled plasma processing apparatus |
abstract |
An inductively coupled plasma processing apparatus includes a processing chamber for accommodating a target substrate to be processed and performing plasma processing thereon, a mounting table provided in the processing chamber for mounting thereon the target substrate, a processing gas supply system for supplying a processing gas into the processing chamber and a gas exhaust system for exhausting the inside of the processing chamber. Further, in the inductively coupled plasma processing apparatus, a high frequency antenna is provided to form an inductive electric field in the processing chamber and a first high frequency power supply is provided to supply a high frequency power to the high frequency antenna. A metal window made of a nonmagnetic and conductive material is formed between the high frequency antenna and the processing chamber while being insulated from a main body which forms the processing chamber. |
isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I627669-B http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I611455-B http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I551196-B http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I634585-B http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I645069-B http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I573168-B http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10777385-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I569693-B http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I594668-B http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I680491-B |
priorityDate |
2009-01-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |