| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8d62e0197ecd2d6ac3b6acf50c572091 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32238
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32091 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-46
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-505
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-50 |
| filingDate |
1996-11-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_aaab5801a03a6c67c33f7ee81c168d40 |
| publicationDate |
2001-07-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2001007245-A1 |
| titleOfInvention |
Hf-plasma coating chamber or pecvd coating chamber, its use and method of plating cds using the chamber |
| abstract |
A HF plasma treatment chamber is provided for at least one dielectric substrate. A HF generator for the plasma discharge, a coupling-in arrangement connected with the generating for supplying HF energy into the chamber, and at least one substrate receiving device defining a receiving surface for the substrate comprise the chamber. The generator is operatively connected with the chamber by way of a dielectric layer. The chamber is a coating chamber and, for the coating of a metallic surface of at least one dielectric substrate and/or the coating of at least one dielectric substrate with a metallic layer. The receiving device as well as the HF connection to the generator are arranged such that the HF discharge current circuit is connected with the chamber by way of the dielectric substrate as the capacitive coupling-in element. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9117668-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10802588-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9165788-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8895415-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2017084816-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10214816-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11746420-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9388491-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9028924-B2 |
| priorityDate |
1995-12-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |