http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-4810281-B2
Outgoing Links
| Predicate | Object |
|---|---|
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-505 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-448 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-285 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-46 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-14 |
| filingDate | 2006-03-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2011-11-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2011-11-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-4810281-B2 |
| titleOfInvention | Plasma processing equipment |
| priorityDate | 2006-03-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 50.