| abstract |
The present invention discloses a kind of honeycomb support surface atom layer plater, including carrier gas system, presoma system, reaction system and control system；The reaction system is connected with carrier gas system and presoma system respectively by pipeline, and sample introduction storehouse is provided with the reaction system, valve is provided with the pipeline；The carrier gas system is used to fill inert gas, and the control system controls the opening and closing of the carrier gas system, presoma system and reaction system.Honeycomb support surface atom layer plater provided by the invention, so as to get uniformity, step coverage rate and the thickness control of coating etc. all tools improve significantly. |