| Predicate |
Object |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-50
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F4-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 |
| filingDate |
1990-12-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
1996-09-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
1996-09-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2537304-B2 |
| titleOfInvention |
Atmospheric pressure plasma reaction method and apparatus |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2014073686-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20210011444-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11309167-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2009238519-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11129267-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10793953-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101023091-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10418226-B2 |
| priorityDate |
1989-12-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |