| Predicate |
Object |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2201-038
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2201-016
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2203-053
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01H2239-01
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01H2057-006
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2203-04 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01G5-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01G5-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01H59-0009
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01G5-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B3-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B3-0078 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01G5-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01G5-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01H59-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81B3-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81C1-00 |
| filingDate |
2004-10-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2007-05-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2007513782-A |
| titleOfInvention |
Electronic device manufacturing method and electronic device |
| abstract |
Providing a base layer and a mechanical layer on the substrate; providing a sacrificial layer between the base layer and the mechanical layer; providing an etch stop layer between the sacrificial layer and the substrate; and sacrificing using dry chemical etching. The dry chemical etching is performed using a fluorine-containing plasma and the etch stop layer is substantially non-conductive such as HfO 2 , ZrO 2 , Al 2 O 3 and TiO 2 . A manufacturing method of a micromachine technology (MEMS) device having a material that does not cause fluorine chemical action. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010179401-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101317870-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9083309-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2011065192-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-5301682-B2 |
| priorityDate |
2003-10-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |