| Predicate |
Object |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32559
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32623
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F4-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-31
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-302
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-683
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-50
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-50
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B23Q3-15
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205 |
| filingDate |
1995-10-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
1996-05-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-960015781-A |
| titleOfInvention |
Plasma Guard for Chambers with Electrostatic Chokes |
| abstract |
The plasma guard member, which has a flat concentric ring shape, surrounds the choke choke to prevent charged particles from floating or diffusing into the lower chamber and contacting the electrostatic choke so that the substrate supporting ability of the plasma reaction chamber and plasma source and choke is not reduced. Used in vacuum processing chambers with lower chambers. |
| priorityDate |
1994-10-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |