http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-4604640-B2
Outgoing Links
| Predicate | Object |
|---|---|
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C4-10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C4-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C4-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205 |
| filingDate | 2004-10-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2011-01-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2011-01-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-4604640-B2 |
| titleOfInvention | Vacuum device parts, manufacturing method thereof, and apparatus using the same |
| priorityDate | 2003-10-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 18.