http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100247917-B1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c16d2144a81bfa32a665dca1e93c3d37 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32669 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32935 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 |
| filingDate | 1996-11-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2000-03-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_afe98426b7cb4b6aa087451d5de57538 |
| publicationDate | 2000-03-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-100247917-B1 |
| titleOfInvention | Method of controlling a plasma uniformity |
| abstract | The present invention relates to a method for controlling plasma uniformity in a plasma reaction chamber for manufacturing a semiconductor device. According to the present invention, there is provided a method of generating a mixed plasma mixed with an inductively coupled plasma and a helicon wave plasma in a reaction chamber, monitoring the density of the mixed plasma in real time, and as a result of the monitoring, the density of the plasma is relative to the edge of the reaction chamber. In the case of high, increasing the strength of the magnetic field applied in the reaction chamber to induce the formation of the helicon wave plasma, and as a result of the monitoring, when the density of the plasma is relatively high in the center of the reaction chamber Reducing the intensity to induce the formation of an inductively coupled plasma. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10971343-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10229818-B2 |
| priorityDate | 1996-11-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID2244 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419556224 |
Total number of triples: 17.