http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20220002908-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_32e7cfbcd94f0bb4309a7945b0bb8ede |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N31-22 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N31-22 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 |
| filingDate | 2020-04-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6d1b12549dd2c7f61ce9e940249d9e7b http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_81d22bc7574ed2a5ece7dbc5e6093420 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f4fcd23a9bb1ca1ab79003ff137d10b3 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_28086aba4776f67e308039b7002f06e4 |
| publicationDate | 2022-01-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-20220002908-A |
| titleOfInvention | Laminates and Indicators |
| abstract | The present invention can easily adjust the sensitivity of the detection layer, reliably detect the progress or end of a process, simply detect that the process is being performed uniformly for the entire object to be treated, and protect against contaminants generated by these processes. An object of the present invention is to provide a laminate and an indicator capable of avoiding contamination. In order to solve the above problems, the laminate of the present invention has a detection layer in which color tone is changed by detecting at least one selected from the group consisting of plasma, ozone, ultraviolet rays and radical-containing gas, and a base layer, and the detection layer A structure having an internal space communicating with the opening on the surface of the silver is provided, and in the internal space, at least one selected from the group consisting of plasma, ozone, ultraviolet rays and radical-containing gas is detected to detect a detection component that changes color tone. A dye compound containing a detection agent containing at least one type, wherein the content of each metal atom in the layered product is less than 5.0 mass ppm, or the detection component does not contain atoms other than carbon, hydrogen, oxygen and nitrogen include |
| priorityDate | 2019-04-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 187.