| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bd9673cec4e1f52fbbdc0a8216fc6422
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c16d2144a81bfa32a665dca1e93c3d37 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02P70-50
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02C20-30 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-321
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05H1-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31116
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32357 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-311
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-46
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 |
| filingDate |
2003-02-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2010-04-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d737ae9055ccf8de3b1057fc824fbb91
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_82535dcf7f4085101c3b2fa1f6aea134
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cb01753055d2f792d03eed269af0e531
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8afd0dd61522354face104612ef32380
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_530869a9c266aa3a09e90b86a8624bf6
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f65ff59f5ca73cd4459ea9ad18bfd2b1 |
| publicationDate |
2010-04-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-I323142-B |
| titleOfInvention |
Method and apparatus for generating gas plasma, gas composition for generating plasma and method for manufacturing semiconductor device using the same |
| priorityDate |
2002-11-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |