| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_900efd82417bba0fbbf6a7f731ef08f8 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-963
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-663
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-96
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-12014
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-5445
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-5436
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-77
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-784
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-3225
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-656
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-658
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-786
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-785
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-85
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-72 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B35-505
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B35-645
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B35-6455 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C04B35-50
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 |
| filingDate |
2008-04-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0a4782b696c6b486f275f9c3e3c2ea55
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ce1b22b2aaba5bbae86ac88dc68a648c |
| publicationDate |
2009-11-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2009263187-A |
| titleOfInvention |
Yttria sintered body and member for plasma process equipment |
| abstract |
A yttria sintered body having high strength and low dielectric loss is provided. SOLUTION: It contains 99.9% by mass or more of yttria, the porosity is 1% or less, the average crystal grain size is 3 μm or less, and the cumulative frequency ratio calculated from the following formula (1) is 3 or less. A yttria sintered body having a dielectric loss tan δ of 1 × 10 −4 or less at a frequency of 1 to 20 GHz. Cumulative frequency ratio = D90 / D50 (1) However, the meaning of each symbol in the above formula (1) is as follows. D90: Crystal grain size (μm) in which the cumulative total from the small particle size side of the particle size distribution on the basis of the number of crystal grains is 90% D50: The cumulative total from the small particle size side of the particle size distribution on the basis of the number of crystal grains 50% crystal grain size (μm) [Selection figure] None |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11376822-B2 |
| priorityDate |
2008-04-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |