http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-4995390-B2
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32477 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4404 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32862 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-44 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 |
| filingDate | 2000-12-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2012-08-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2012-08-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-4995390-B2 |
| titleOfInvention | Method for cleaning and conditioning a plasma reaction chamber |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2019169298-A1 |
| priorityDate | 1999-12-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 21.