| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_985f1bf0df4204078e687f8417dc5871
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_4a557b00249a3ad2c171dc22fe67010c |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-68742
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67098
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3244
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67028
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02046
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-67
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-687
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 |
| filingDate |
2018-11-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_502fd2e3553b2f7ef944e2155438fbee
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_65ca3b727bf4b18776ce3b2d17a92cb4
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_243808fe6688587d91f4c46d233688d3 |
| publicationDate |
2020-05-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20200059419-A |
| titleOfInvention |
Method for treating substrate and apparatus for treating substrate |
| abstract |
The present invention provides a method for processing a substrate. In one embodiment, the substrate processing method includes the steps of bringing in a substrate having a contact hole formed on an insulating layer; Providing a first process gas to remove the natural oxide film; Oxidizing a damaged layer formed in the contact hole by providing a second process gas discharged and supplied in a plasma state; Providing a third process gas to remove the oxidized damaged layer; And carrying out the processed substrate. |
| priorityDate |
2018-11-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |