http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-201643959-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fbdc51c2665335e616caf341cdaa3d28 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76898 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-32 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768 |
| filingDate | 2016-05-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a74fc765872d2c48c507c53e08a71bae http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_aca2247ecfb8e4092263a692934cbc37 |
| publicationDate | 2016-12-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | TW-201643959-A |
| titleOfInvention | Method for etching through-holes and germanium through-hole etching device |
| abstract | The present invention provides a method of etching a via hole and a via via etching apparatus. A method for etching a via hole on a back surface of a germanium substrate, comprising: placing a germanium substrate in a reaction chamber of a plasma etching apparatus with a back side facing upward, and forming a germanium material layer on a back surface of the germanium substrate a hard mask layer is formed with a photoresist pattern formed thereon; the photoresist pattern is used as a mask, the hard mask layer is etched to form a hard mask pattern; and the residual photoresist pattern is removed; The hard mask pattern acts as a mask, etching the underlying germanium material layer to initially form the germanium via; removing the residual hard mask pattern; etching the germanium material layer globally; and removing the germanium substrate out of the reaction chamber. |
| priorityDate | 2015-06-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 24.