http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-5041114-B2
Outgoing Links
Predicate | Object |
---|---|
classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32192 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-321 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-32 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-46 |
filingDate | 2002-07-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate | 2012-10-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationDate | 2012-10-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | JP-5041114-B2 |
titleOfInvention | Method and apparatus for low energy ion generation and transport by microjets in plasma processing |
priorityDate | 2001-07-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 17.