http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-3096710-B2
Outgoing Links
Predicate | Object |
---|---|
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-302 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F4-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205 |
filingDate | 1993-02-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate | 2000-10-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationDate | 2000-10-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | JP-3096710-B2 |
titleOfInvention | Plasma processing equipment |
isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2014027428-A |
priorityDate | 1993-02-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Predicate | Subject |
---|---|
isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419512635 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID962 |
Total number of triples: 14.