http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-201831052-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d80f1040809503e54509c871ba828f75 |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B08B7-0035 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-335 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2015-0693 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32889 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67069 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32972 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09J11-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N15-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-02 |
| filingDate | 2017-12-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4cbc909c34303365c23cb74c31f6b3f2 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9cea452d3f023f6617429ce2c8ec5bf6 |
| publicationDate | 2018-08-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | TW-201831052-A |
| titleOfInvention | Consumption judgment method and plasma processing device |
| abstract | It is an object of the present invention to determine the degree of consumption of a specific consumption member in a processing chamber. The present invention provides a method for determining consumption, which includes the following steps: using a plasma generated by a plurality of gases containing fluorine gas to process a substrate; and using a measurement mechanism of OES (Optical Emission Spectroscopy), from the above plasma Obtaining the luminous intensity of a plurality of gases containing fluorine gas; and referring to the memory section, calculating the consumption rate of a specific consumable component according to the obtained luminous intensity of the aforementioned plurality of gases including fluorine gas, wherein the memory section includes the The luminous intensity of a plurality of kinds of fluorine gas is correlated with the consumption rate of a specific consumption component and memorized. |
| priorityDate | 2016-12-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 31.