http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2003007683-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_be055db3c1a09879df07379ba969e223 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-46 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-302 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01J19-08 |
| filingDate | 2001-06-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4660a8f141b1ccbd295e02a948da37d8 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8a88c0a76a014aee72a8744cddbfb76b http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a69071bc50bac497beab4c939db4c4dc http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e64b3d85723f138e6fd859fdbeaca4ad |
| publicationDate | 2003-01-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2003007683-A |
| titleOfInvention | Plasma processing equipment |
| abstract | (57) [PROBLEMS] To provide a plasma processing apparatus capable of preventing abnormal discharge and performing uniform etching in plasma processing of a silicon-based substrate. SOLUTION: In a plasma processing apparatus, as a material of an electrode member 17 for a plasma processing apparatus which is mounted on a front surface of a gas supply port of a plasma generating electrode, a ceramic skeleton portion 18a containing alumina is continuously formed in a three-dimensional network. A gas for plasma generation is made to pass through the pores 18b formed irregularly in the three-dimensional network structure using the ceramic porous body having the three-dimensional network structure. Thereby, the distribution of the supplied gas is made uniform, abnormal discharge is prevented, and uniform etching without variation can be performed. |
| priorityDate | 2001-06-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 26.