http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I239795-B
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d80f1040809503e54509c871ba828f75 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05H1-46 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32192 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32238 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-46 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-32 |
| filingDate | 2003-06-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2005-09-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_dfd0948dce48f0cddd9b71bae10cb02a http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_97883ade54665dd2aa3b7162da9f2aaf |
| publicationDate | 2005-09-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | TW-I239795-B |
| titleOfInvention | Plasma processing device |
| abstract | The plasma processing device of the present invention comprises the chamber 1 for processing a plasma inside; a top plate 15 made of dielectric blocking the upper side of the chamber 1; and an antenna part 3 functioning as a high frequency supplying means supplying high frequency in the chamber 1 through the top plate 15. The top plate 15 has reflection members 23a, 23b inside. The side wall of the reflection members 23a, 23b acts as a wave reflection means for reflecting the high frequency wave traveling inside the top plate 15 in the radial direction. Or, the recess of the top plate 15 may be utilized as the wave reflection means instead of the reflection. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I415526-B |
| priorityDate | 2002-06-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID962 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419512635 |
Total number of triples: 21.