| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bce787970b69aeb08d159e7c101c9ed7 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-3346
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-3345
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-3382
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01F2029-143
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-3343 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32146
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32165
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32082
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-321
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32458
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-517
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6831
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31116
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32871
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32467
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32522
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32688
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32706
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-517
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-311
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-306
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-302
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-683
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-00 |
| filingDate |
1997-04-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
1998-04-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_080a45179f13624a6485899b14b7c365
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e954f17213d0af9da3fbc79d1bec5e41
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_69a1ee84567050b7c075737e9d0385b5
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ff3bcb853be11fdccf5ef4de282e3d71
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5d4b0a53293d884ff928822204e8224c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5a2f52189c2fc30e6e52911d18f93998
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9836c0d5140f216a31d31110aa9074bf |
| publicationDate |
1998-04-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-329535-B |
| titleOfInvention |
Plasma reactor with heated source of a polymerhardening precursor material |
| abstract |
A plasma etching method includes: Provide a chamber in which the process is proceeded; The object to be processed is supported by a carrier in the chamber; Supply a process gas consisting of at least the etching agent and the polymer precursor material; Supply a silicon or carbon source material, besides the process gas, to the chamber; Generate a kind of plasma in the chamber; Heat up the source material sufficiently at least to a degree that the reaction between the source surface and the plasma can be maintained. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I466164-B |
| priorityDate |
1996-05-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |