http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-4570372-B2
Outgoing Links
| Predicate | Object |
|---|---|
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C03C17-245 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-458 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C04B41-87 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-46 |
| filingDate | 2004-02-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2010-10-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2010-10-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-4570372-B2 |
| titleOfInvention | Materials for plasma-resistant semiconductor manufacturing equipment |
| priorityDate | 2004-02-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 23.