patent/TW-202101583-A

http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-202101583-A

Outgoing Links

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filingDate	2020-03-26-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor	http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4f1cac1d56f3d656c9973acb33104104 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1233b25b614a0e09b1a1a2c1e142c52f http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d9c951619d0798d23055d6214fe24eb1 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9109199e1cd53f7fd698b2441da2ac1c http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_877848a27ae1c37b2f81c694dcc67389 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fcab8f06c295151a0672d38b55137d9b http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7aab83129bb6de815fec4b7e8551f8a1
publicationDate	2021-01-01-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber	TW-202101583-A
titleOfInvention	Component for plasma processing device, plasma processing device equipped with the component, and method of using sintered body
abstract	The present invention provides a component for a plasma processing device, which only contains a tungsten carbide phase, contains at least one atom selected from the group consisting of Fe atoms, Co atoms and Ni atoms, and the total content of the atoms is 30-3300 Atomic ppm.
priorityDate	2019-04-04-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type	http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate	Subject
isDiscussedBy	http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID2724274 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419526597

Total number of triples: 54.