| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c21d5eafb957eaf39c575f094d134037
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_4b13607467b52577e553bb2ad06e24c8 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31138
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31116
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F4-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-427 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-302
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-42
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-311
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F4-00 |
| filingDate |
1978-11-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_81782b171ca88364c7a18fc70e98f513
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_023b96f57ad0198dd55c31fb61563d61 |
| publicationDate |
1979-05-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
DE-2848691-A1 |
| titleOfInvention |
METHOD AND GAS FOR TREATMENT OF SEMICONDUCTOR COMPONENTS |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0184917-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4613305-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-3410023-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0164892-A1 |
| priorityDate |
1977-11-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |