http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-970004050-A
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S438-978 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-8234 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-76808 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-14831 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-8234 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-148 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-302 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L31-10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L31-02 |
| filingDate | 1995-06-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 1997-01-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-970004050-A |
| titleOfInvention | Method of manufacturing CSI (CCD) image pickup device |
| abstract | BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method of manufacturing a charge coupled device (CCD) imaging device, and more particularly, to a process capable of perfecting a light blocking film.n n n As in the prior art, when the interlayer insulating film is formed, the first insulating layer below is formed of BPSG, and the PSG layer having a higher etching speed is deposited and formed at the interface with the PSG layer during wet etching. The positive slop is made by making the etching speed on the surface of the interlayer insulating film faster than the etching speed, so that only the oxide layer 22 remains between the light shielding metal layer and the gate electrode as in the conventional art, so that the step is minimized to smear. It is effective in preventing, and sufficient STEP-COVERAGE is secured when the light-shielding metal layer is deposited even between HCCD-VCCD interfaces, so that the metal layer is broken and the incident light directly flows into the CCD channel, thereby reducing noise. It is done. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9272952-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100367323-B1 |
| priorityDate | 1995-06-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 22.