http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-0016389-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_3a62c92e56568bd104089aac22ca487b |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31116 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-78 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-336 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-302 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-311 |
| filingDate | 1999-03-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_804b153ecc5a2c80ed41b36602131833 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_922e220d8b71b2f35158448031db1e70 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_68e1e13d77782536152cece332384e00 |
| publicationDate | 2000-03-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | WO-0016389-A1 |
| titleOfInvention | Device and method for etching spacers formed upon an integrated circuit gate conductor |
| abstract | A dry etch process is presented wherein a semiconductor substrate (16) is introduced into a reaction chamber (11) between a first electrode (12) and a second electrode (14). The semiconductor substrate (16) may be positioned on the first electrode (12). A main flow of gas that includes an argon flow at an argon flow rate and a fluorocarbon flow at a fluorocarbon flow rate is established into the reaction chamber (11). RF power (22) at a low frequency may then be applied to the first electrode (12) for creating a fluorine-deficient plasma. An oxide layer (38) arranged above the semiconductor substrate (16) is exposed to the fluorine-deficient plasma for etching, in a single step, a portion of the oxide layer (38). |
| priorityDate | 1998-09-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 30.