| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8cf8d77ac0eff1767b22d2fb9445b64d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8f1c0355c0795d598b06b0e04cebe0ed
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_f3d1f16f1a77efff38ea46c662fd1493
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_845ef2560bad0a6aba5a50d9fbbf24b6 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-31678
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J2219-0231
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J2219-025
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-26 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-27
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-0272
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32495
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J19-0073
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J19-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4404
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-44 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-44
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01J19-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-27
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C30-00 |
| filingDate |
2001-11-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_893e385f67fcd2eecda60b360632a302
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a45134d4a0260988a58421bfd06c7354
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5a65ef39dcbad1099f3d9d68d2567109 |
| publicationDate |
2002-07-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
WO-02054454-A2 |
| titleOfInvention |
Diamond coatings on reactor wall and method of manufacturing thereof |
| abstract |
A corrosion resistant component of semiconductor processing equipment such as a plasma chamber includes a diamond containing surface and process for manufacture thereof. The equipment may be a plasma etching chamber. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2010009467-A3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1637626-A2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9108888-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8152377-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8096205-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7273655-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7119032-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9883723-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2004063421-A3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7771821-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2004063421-A2 |
| priorityDate |
2000-12-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |