http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-3323298-B2
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F02B1-04 |
| classificationIPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/F02B1-04 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F4-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-302 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-683 |
| filingDate | 1993-09-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2002-09-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2002-09-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-3323298-B2 |
| titleOfInvention | Electrostatic chuck device and plasma processing apparatus provided with the same |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9001490-B2 |
| priorityDate | 1993-09-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 18.