| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_03721e344a72026d125291e6c56c1be6
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8ccc837566f72dc6f52c4511aab0b800
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1c8cbbf2290b3f3a9988da29598baa2c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_6b88df00c65d7b99a3174ea6f3691e62 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02381
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0237
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L33-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-30621
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-30617
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-30612
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L33-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02458
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0254
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0257
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02639
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0262 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0237
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02381
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L33-007
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02433
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02458
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0257
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0254
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0262
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02639
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0259 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L33-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L33-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-306 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L33-00 |
| filingDate |
2014-12-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2017-04-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e2ebe84222348bc3079635ebf6d0a60d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4ecae20c3e0bf14921df892da8f4df34
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_69f2d0e4eb1bb4b8f668a3a2037b718d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_770b198658bad8957763fb2004c4f06b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_256686a5e6f82e1ff6867e153204dbb9 |
| publicationDate |
2017-04-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-9627199-B2 |
| titleOfInvention |
Methods of fabricating micro- and nanostructure arrays and structures formed therefrom |
| abstract |
Methods of fabricating micro- and nanostructures comprise top-down etching of lithographically patterned GaN layer to form an array of micro- or nanopillar structures, followed by selective growth of GaN shells over the pillar structures via selective epitaxy. Also provided are methods of forming micro- and nanodisk structures and microstructures formed from thereby. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10937777-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-111033763-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10014436-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2017204531-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2017148945-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10246793-B2 |
| priorityDate |
2013-12-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |