| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_49c7c7d947f4481d87620430416a22b3
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bb5143c5d291d49c700ac1631bdd20df |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-68757
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-24355
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67069
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03C2203-42
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03C2201-21
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03C2204-08 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03C3-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32477
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32559
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-687 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C03C3-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C03C15-00 |
| filingDate |
2001-08-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2008-01-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_193ac59a84d5231bb694e6822f1c4d71
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4bba352a30d3bafbb22f519721a23c86
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_96a9861f4ab6149941f4b5b773fb4758 |
| publicationDate |
2008-01-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
DE-60128302-T2 |
| titleOfInvention |
Plasma remains quartz glass holder |
| priorityDate |
2000-08-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |