| Predicate |
Object |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-2594 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32935
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-266 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-302
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01Q30-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 |
| filingDate |
2000-08-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2008-06-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2008-06-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-4107791-B2 |
| titleOfInvention |
Method for discriminating the degree of charge charging induced by plasma used in the manufacture of semiconductor devices and discrimination device used therefor |
| priorityDate |
1999-08-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |