http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007123843-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d80f1040809503e54509c871ba828f75 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-46 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205 |
| filingDate | 2006-09-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bd387bf696d3166b630a637a35eca73d http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6459ccf2df5134230454a1fc1f8496fa |
| publicationDate | 2007-05-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2007123843-A |
| titleOfInvention | Mounting table, substrate processing apparatus, plasma processing apparatus, mounting table control method, plasma processing apparatus control method, control program, and storage medium |
| abstract | A substrate processing apparatus capable of improving the yield of a semiconductor device is provided. A plasma processing apparatus 10 as a substrate processing apparatus includes a mounting table 35 that electrostatically attracts a wafer W mounted thereon. The plasma processing apparatus 10 directly or indirectly adjusts the temperature of the wafer W so as to be substantially equal to the target temperature based on a temperature measurement apparatus 200 that measures the temperature of the wafer W and a preset parameter. It is connected to the control device 400. The control device 400 automatically controls the temperature of the wafer W based on the measured temperature. [Selection] Figure 2 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102225682-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101576057-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8986494-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2017011169-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20200036581-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20150070981-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010199526-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102360230-B1 |
| priorityDate | 2005-09-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 24.