http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-960020626-A
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3222 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32678 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05H1-46 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32192 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-46 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F4-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-203 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-50 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-511 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-32 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-265 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-302 |
| filingDate | 1995-10-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 1996-06-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-960020626-A |
| titleOfInvention | Plasma generator that can separate microwave wave band and absorption band |
| abstract | The present invention relates to a dispersing device for dissipating microwave energy to excite the plasma in the closure. According to the invention the dispersing device comprises at least one triple exciter element comprising at least one second irradiator p2 operating together with the first irradiator p1 and the exciter e. The first irradiator p1 and the second irradiator p2 are mounted in parallel with each other and spaced apart from each other to define a microwave energy wave band P, and the exciter e is the first and second irradiators P1. The exciter is arranged in such a way that the electron trajectory P does not cross the radio wave band P so as to separate the radio wave band P and the absorption band A with respect to P2. |
| priorityDate | 1994-11-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID451814683 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6433164 |
Total number of triples: 23.