http://rdf.ncbi.nlm.nih.gov/pubchem/patent/BR-PI1000279-A2
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bd7f21d73f49cea926e54636e5b9ad73 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 |
| filingDate | 2010-01-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_512cf48adc13be6a54f7f280951d6d9e |
| publicationDate | 2011-03-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | BR-PI1000279-A2 |
| titleOfInvention | equipment and process for depositing metallic film on substrate |
| abstract | EQUIPMENT AND PROCESS FOR THE DEPOSITION OF METALLIC ILME IN SUBSTRATE equipment consists of a plasma reactor comprising a discharge chamber (1) with the following arrangement: - a magnetron (2) powered by a power source (6); - an anode or removable substrate (3) which is positioned opposite the magnetron (2) and which is powered by a power source (7); - an opening (4) for a vacuum pump (8); - an opening (5) for the gas inlet; - an opening (9) for the entrance of the vacuum meters (10) and - a grounded screen (11) next to the magnetron (2). The magnetron (2) comprises a titanium disc (21) that acts as a cathode, behind which the magnets (22) are positioned. The magnetic assembly (22) comprises an iron disc (23), an outer ring magnet (24) and a conical inner magnet (25). The process of depositing thin metallic films on a metallic substrate comprises the following operations: - cleaning the substrate by ultrasound with water and neutral soap; - application of a primer varnish to correct imperfections in the manufacture of the piece; - metallization performed in a plasma reactor; - application of a finishing varnish for mechanical and chemical protection of the film. To carry out the process of depositing thin metal films on a flexible polymeric substrate, an operation to change the surface tension of the substrate by applying plasma to the part is added, after cleaning and before applying the primer varnish. |
| priorityDate | 2010-01-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 18.