| Predicate |
Object |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-31544
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K2003-1053 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1003
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1009 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08J7-06 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-10 |
| filingDate |
2007-06-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2012-08-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2012-08-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-4992897-B2 |
| titleOfInvention |
Seal material, component for plasma processing apparatus having the seal material, and method for producing the seal material |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10011691-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2015168690-A |
| priorityDate |
2006-06-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |