http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2022146850-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_ec83ea8e6721b1a5654b038fdb9b223f |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-306 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-24 |
| filingDate | 2021-09-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_292f7c7a211b1ec462d2575bcad1ed9d http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d065ddc30e3c4dd74df9dfe4aa4a19e4 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c75914da02e9f82896bd4a23aa0a7e9a |
| publicationDate | 2022-10-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2022146850-A |
| titleOfInvention | PLASMA GENERATOR, PLASMA GENERATION METHOD, AND SUBSTRATE PROCESSING APPARATUS |
| abstract | A technique capable of controlling the temperature of a plasma source with higher accuracy is provided. A plasma generator (1) includes a plasma source (2), a cooling member (4), a temperature measuring section (6), and a control section. A plasma source 2 generates a plasma. The cooling member 4 has at least one air inlet 411 for supplying cooling gas to the plasma source 2 . A temperature measuring unit 6 measures the temperature of the plasma source 2 . The control section controls the flow rate of the cooling gas based on the measured temperature measured by the temperature measurement section 6 . [Selection drawing] Fig. 4 |
| priorityDate | 2021-03-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 18.