| Predicate |
Object |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-66181
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-308
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-302 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-108
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-8242
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-822
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-308
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-302
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-334 |
| filingDate |
1987-08-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
1997-07-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
1997-07-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2635607-B2 |
| titleOfInvention |
Method for manufacturing semiconductor device |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7354829-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6469345-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6864532-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6521538-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6482701-B1 |
| priorityDate |
1987-08-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |