http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-4483234-B2
Outgoing Links
| Predicate | Object |
|---|---|
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-24 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-31 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-44 |
| filingDate | 2003-09-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2010-06-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2010-06-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-4483234-B2 |
| titleOfInvention | Cleaning method for atmospheric pressure plasma processing apparatus and atmospheric pressure plasma processing apparatus |
| priorityDate | 2003-09-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 25.