http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-3592642-B2

Outgoing Links

Predicate Object
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-316
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-302
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768
filingDate 2001-01-22-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2004-11-24-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationDate 2004-11-24-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-3592642-B2
titleOfInvention Method for manufacturing semiconductor device
priorityDate 2001-01-22-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate Subject
isDiscussedBy http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419556970
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID947

Total number of triples: 13.