http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013062342-A

Outgoing Links

Predicate Object
assignee http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_0950e9df7f0e1b73efee1bda859951ad
classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B25-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4405
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B08B7-00
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-44
filingDate 2011-09-13-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ebd466e0dd9ed67aca1d904438dd032c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_98f5bd0b3fcccf61d4c3d64e2e9c949d
publicationDate 2013-04-04-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-2013062342-A
titleOfInvention Cleaning method for film forming apparatus
abstract An object of the present invention is to enable efficient cleaning in a film forming apparatus. According to one embodiment, a method of cleaning a film forming apparatus includes the steps of converting a cleaning gas having any one of chlorine gas, hydrocarbon gas, and chlorinated hydrocarbon gas into plasma, and the plasmaized cleaning gas. Supplying to the inside of the heated film forming apparatus. [Selection] Figure 2
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2016174059-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2016080450-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2015062210-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2020100554-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2016201481-A
priorityDate 2011-09-13-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate Subject
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2011056783-A2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2006060167-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H06302565-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2011031556-A2
isDiscussedBy http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419527520
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6324
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458392875
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6325
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID158605
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID24526
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559535
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419556973
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID455728551
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559546
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID15051
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6334
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559542
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419518858
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID297
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559593
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419556968
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID447573583
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6327
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID783
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6326
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5460631
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID425193155
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID426105809

Total number of triples: 49.