| Predicate |
Object |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F4-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02071 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F4-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-302
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F11-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3213 |
| filingDate |
1981-07-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
1985-11-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
1985-11-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
DE-3127765-C2 |
| titleOfInvention |
Process for preventing post-etching corrosion of layers of aluminum |
| abstract |
Method of preventing post-etching corrosion of layers of aluminum or aluminum alloys which have been etched using chlorinated plasma; the etched layer is exposed to a fluorinated plasma. |
| priorityDate |
1980-07-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |